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SEM Calibration Standards

SEM Calibration Standards

 

Silicon Test Specimen


Planotec single crystal silicon overall dimension is 5x5 mm. The squares repeat every 10 micrometers. The dividing lines are about 1.9 micrometers and formed by electron beam lithography. A broader marking line is written every 500 micrometers, which is a very useful additional feature for light microscopy. Some specimens can be mounted directly onto the calibration specimen so that an internal calibration is obtained on the  micrograph.
 

Cat  #

Description

Qty

721

Planotec Silicon test specimen unmounted

Each
721-1

Planotec Silicon test specimen unmounted

10/pkg
721-2

Planotec Silicon test specimen mounted on 12.7mm diameter pin type mount

Each
721-3

Planotec Silicon test specimen mounted on your mount of choice

Each
721-4

Planotec Silicon test specimen for incident light microscopy mounted on black slide.

Each
721-5

Calibration certificate for silicon specimen.

Each
Please use the catalog number and description when ordering.


A certificate of calibration can be supplied. A single silicon test specimen can be calibrated to a guaranteed accuracy of better than 1% and a laboratory certificate is provided to this effect. The specimen is checked against a reference specimen calibrated by laser beam interferometry at  the National Physical Laboratory, England 

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 SIRA Calibration Specimens


The SIRA calibration specimens have been specially prepared for scanning electron microscopy. These are metal replicas of cross ruled gratings OD area (60mm2) with 19.7 lines/mm for low magnification and 2160 lines/mm for high magnification calibration. These specimens can be used for specimen stage tilt control calibration and to check on innate distortion. These specimens are accurate to 1%.


A certificate of calibration can be supplied. A single silicone test specimen can be calibrated to a guaranteed accuracy of better than 1% and a laboratory certificate is provided to this effect. The specimen is checked against a reference specimen calibrated by laser beam interferometry at  the National Physical Laboratory, England 


The certificate is for one specimen out of the set two. Please indicate which specimen you wish to certify by indicating the Catalog #.
 

Catalog #

Description

Qty

S170

 SIRA test specimens, Set of 2,mounted on 12.5mm pin stubs.

1 set
S170A

SIRA test specimens, Set of 2,mounted on 10 mm JEOL stubs.

1 set
S170B

SIRA test specimens, Set of 2,mounted on ISI, TOPCON stubs.

1 set
S170C

SIRA test specimens, Set of 2,mounted on 15mm Hitachi stubs.

1 set
S170D

SIRA test specimens, Set of 2,mounted on customer’s stubs.

1 set
S170E

 SIRA test specimens, Set of 2,mounted on 12.5mm JEOL stubs

1 set
S1960

Calibration certificate for 2160 lines/mm, SIRA

Each
S1961

Calibration certificate for 19.7 lines/mm, SIRA

Each
Please use the catalog number and description when ordering.

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Agar Fine Copper Mesh on Folding Grids.


These selected fine mesh grids are suitable for scanning electron microscopes and the low magnification range of transmission electron microscopes. The fine mesh is held within a folding grid. For SEM the grids should be mounted on stubs.
 

Catalog #

Description

Qty

S151

1000 mesh copper in 3.05mm folding grids

Each
S152

 1500 mesh copper in 3.05mm folding grids

Each
S153

 2000 mesh copper in 3.05mm folding grids

Each
Please use the catalog number and description when ordering.

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 Resolution Test Specimen - Gold on Carbon


This specimen has a particle size range from approx. 5 nm to150 nm. Each specimen has a square grid pattern with large crystals in the centre of each grid square and very fine crystals at the edges of each grids.
 

Catalog #

Description

Qty

744

Gold on Carbon resolution test specimen on 12.5mm pin type stub.

Each
744-1

Gold on Carbon resolution test specimen on 10 mm Jeol stub.

Each
744-2

Gold on Carbon resolution test specimen on ISI/ Topcon stub.

Each
744-3

 Gold on Carbon resolution test specimen on 15mm Hitachi stubs.

Each
 744-4

Gold on Carbon resolution test specimen on 12.5mm Jeol stubs.

Each
744-5

 Gold on Carbon resolution test specimen on customer’s stubs

Each

744-6

Gold on Carbon resolution test specimen on thin 0.5mm carbon disc.

Each

Please use the catalog number and description when ordering.



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High Resolution Test Specimen - Gold on Carbon
 

Particle size range <3nm - 50nm. Suitable for high resolution SEM. A magnification of x80,000 is required to clearly resolve the gold particles.
 

Catalog #

Description

Qty

745

High resolution Au-C test specimen on pin type stub

Each
745-1

 High resolution Au-C test specimen on 10 mm Jeol stub,

Each
745-2

High resolution Au-C test specimen on ISI/Topcon stub

Each
745-3

High resolution Au-C test specimen on 15 mm Hitachi stub

Each
745-4

High resolution Au-C test specimen on 12.5 mm Jeol stub

Each
745-5

High resolution Au-C test specimen on customer’s stub,

Each
745-6

High resolution Au-C test specimen unmounted

Each
Please use the catalog number and description when ordering.

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Ultra High Resolution Test Specimen - Gold on Carbon
 


Particle size range <3nm - 50nm. Suitable for high resolution SEM. Magnification of x50,000 and above
 

Catalog #

Description

Qty

746

High resolution Au-C test specimen on pin type stub

Each
746-1

High resolution Au-C test specimen on 10 mm Jeol stub

Each
746-2

High resolution Au-C test specimen on ISI/Topcon stub

Each
746-3

High resolution Au-C test specimen on 15 mm Hitachi stub

Each
746-4

 High resolution Au-C test specimen on 12.5 mm Jeol stub

Each
 746-5

High resolution Au-C test specimen on customer’s stub

Each
746-6

High resolution Au-C test specimen on thin (0.5mm) carbon disc

Each
746-7

High resolution Au-C test specimen unmounted

Each
Please use the catalog number and description when ordering.

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Tin on Carbon Resolution Test Specimen


An alternative test specimen for medium resolution. Thin spheres of 10-100nm are dispersed on a carbon substrate. Ideal for stigmatism correction. It is also recommended for use in SEM employed in the semi-conductor industry where the usual gold on carbon cannot be used.

Catalog #

Description

Qty

782

Resolution Sn-C test specimen on pin type stub

Each
782-1

Resolution Sn-C test specimen on 10 mm Jeol stub

Each
 782-2

 Resolution Sn-C test specimen on ISI/Topcon stub

Each
782-3

Resolution Sn-C test specimen on 15 mm Hitachi stub, each

Each
782-4

Resolution Sn-C test specimen on 12.5 mm Jeol stub

Each
782-5

Resolution Sn-C test specimen on customer’s stub

Each
 782-6

Resolution Sn-C test specimen on thin (0.5mm) carbon disc

Each
782-7

 Resolution Sn-C test specimen unmounted

Each
Please use the catalog number and description when ordering.

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SEM Standard
Aluminum - Tungsten Dendrites

This test specimen is intended for use in evaluating the resolution and performance of SEM. The denritic structure formed on the surface has various spacing that can be used to evaluate the resolution at both low and high magnifications and has a high secondary electron emission. It is non magnetic, vacuum clean, has no adverse reaction (melting) to an electron beam and no surface preparation or coating is necessary. The standard is supplied unmounted.

Cat #

Description

Qty

784

Aluminum/Tungsten Dendrites standard, unmounted

Each
Please use the catalog number and description when ordering.

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Critical Dimension (CD) Calibration Test Specimen
 


Critical Dimension calibration test specimen of 10-5-2-1 um is very useful for magnification calibration. The CD calibration test specimen is of particular interest to microscopists and test engineers using high performance SEM’s for critical measurement

Silicone standard size: 4.8 x 4.8 mm has a series of chess patterns around its edges with a side length of 480um. These can be used for optimizing imaging parameters and distortion checking.


The central region of the standard contains a series of four line patterns each one clearly identified with its pitch size. Each pattern is made up of 5 bars and spaces of equal width. Pitches for the individual patterns range in size from 1.0um - 10.0um Each standard is identified by a unique serial number. Specimen supplied unmounted.
 

Catalog #

Description

Qty

S1995

CD calibration specimen, non certified

Each
S1997

CD calibration specimen, certified*

*Certified by the German Physikalisch Technische Bundesanstalt.

Each
Please use the catalog number and description when ordering.

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Waffle SEM Magnification Standard

 
A specially prepared cross line grating replica is mounted on a SEM specimen stubs. Special evaporation technique brings out the contrast necessary to observe easily this high-density grating and thus offer the high resolution SEM investigator a method for accurate magnification calibration.

Catalog #

Description

Qty

736

SEM magnification standard on pin type stub

Each

736-1

SEM magnification standard on Amray pin stub

Each

736-2

SEM magnification standard on 10mm x 10mm

Each

736-3

SEM magnification standard on 15mm x 15mm

Each

736-4

SEM magnification standard on 15mm x 10mm

Each

736-5

SEM magnification standard on 15mm Hitachi

Each

736-6

 SEM magnification standard, unmounted

Each

Please use the catalog number and description when ordering.

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Celestial Spheres


Polystyrene spheres of  9.89um mean size. They are prepared in  gravity-free conditions, where an exceptionally uniform sphere is produced. They can be dispersed over any specimen to be examined. Spheres are available in suspension or dispersed on a silicone disc - (uncoated). The disc has to be mounted on a specimen stub.

Catalog #

Description

Qty

723-10

Celestial spheres, uncoated, dispersed on a disc

Each
723-11

Celestial spheres in suspension

5 ml
Please use the catalog number and description when ordering.

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Duplex Specimen
(Reference Sample for BSE Detection System)
 


Very sensitive test is by means of an alloy with two major copper/zinc phases separated  by an atomic number difference of 0.1.  The light phase illustrated in the micrograph has a mean  atomic number of 29.47and the dark phase a mean atomic number of 29.37.
 

Catalog #

Description

Qty

723-20 Duplex reference specimen. Each
Please use the catalog number and description when ordering.

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Reference Specimens for Back-Scattered Electron Detection Systems



When equipped with a back scattered electron detector, an electron microscope has the capability to produce images in which the contrast is controlled by differences in atomic number across the specimen. Three reference specimens are now available that are suitable for testing the atomic number contrast performance. Each of the reference specimens consists of two high purity elements that have an atomic number difference of 1. They are in the form of a wire of the low Z element embedded in a matrix of the high Z element. The specimens are available as a single mount in 5 mm diameter block.

Cat #

Description

Qty

S1950

BSE reference specimen, copper/nickel Z=(29-28)

Each
S1951

BSE reference specimen, silver/palladium Z=(47-46)

Each
S1952

BSE reference specimen, gold/platinum Z=(79-78)

Each
Please use the catalog number and description when ordering.

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Chessy Test Specimen

This specimen can be used for SEM magnification calibration in the range x20 to x50,000 and also useful for orthogonality and distortion checking. The specimen is fabricated by electron beam lithography techniques producing alternate squares of gold and silicone in a chessy board pattern. The largest pattern has a side length of 1 mm which is further divided into 10 x 100um squares. The gold squares are further divided into 10 x 10um and 10x1um squares.

Catalog #

Description

Qty

S171

Chessy test specimen

Each
Please use the catalog number and description when ordering.

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Polystyrene Latex Particles
Magnification Calibration.



These are in generally  too small to be used for light microscopy but are in a good size range for SEM. It is possible to derive an internal standard of size by mixing a suitable concentration of these particles with the particles of unknown size being studied. The material: Polystyrene. It is important not to subject these spheres to excessive irradiation. All solutions are approximately 0.1% weight by volume.  Packed in vials of 5 ml. The particle sizes available are listed with the catalog number


Particle sizes shown may vary due to batch availability
 

Catalog #

Description

Qty

S130-1

 0.112um polystyrene latex particles

5 ml
S130-2

 0.137um polystyrene latex particles

5 ml
S130-3

 0.182um polystyrene latex particles

5 ml
S130-4

 0.204um polystyrene latex particles

5 ml
S130-5

 0.305um polystyrene latex particles,

5 ml
S130-6

 0.535um polystyrene latex particles

5 ml
S130-7

1.036um polystyrene latex particles

5 ml
Please use the catalog number and description when ordering.

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Low Voltage Resolution Tin on Carbon

Tin on carbon specimen with larger spheres for ease of   use in low kV imaging, where gold on carbon may not be appropriate. The spherical of the balls makes it ideal for astigmatism assessment.

Catalog #

Description

Qty

S1988

Low kV Sn-C test specimen on pin type stub

Each
S1988A

Low kV Sn-C test specimen on 10mm Jeol stub,

Each
S1988B

Low kV Sn-C test specimen on ISI/Topcon stub,

Each
S1988C

Low kV Sn-C test specimen on 15mm Hitachi stub,

Each
S1988D

Low kV Sn-C test specimen on 12.5mm Jeol stub,

Each
S1988E

Low kV Sn-C test specimen on customer’s stub,

Each
S1988T

Low kV Sn-C test specimen on thin carbon disc,

Each
S1988U

Low kV Sn-C test specimen unmounted

Each
Please use the catalog number and description when ordering.

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Geller Reference Standard MRS-3


The MRS-3 is a universal magnification calibration standard
which can be used with a wide range of instrumentation, SEM TEM, Optical reflection, scanning probe and confocal. The patterns are anti-reflective chromium on quartz which have been fabricated using electron beam lithography techniques. This proprietary coating virtually eliminates electron beam charging at any accelerating voltage when used in a scanning electron microscope. The geometric design of the MRS-3 contains groups of nested squares spanning several orders of magnitude with pitches of 500um, 50um and 2um. The largest pattern is 8mm square giving a magnification measurement range from x10 to  x50,000 A series of nested squares and rectangles is provided for X, Y calibration and these range in size from 1um to 120um. Another pattern included consists of circles ranging in size from 2um diameter to 100um. This can be used for checking particle size counting systems. The standard can also be used for measurements in the Z plane where the pattern height is 0.1um +/- o.oo3um. The Z plane measurement is most useful for profilometry.


The standard is available in 3 versions:


A./ non certified,
B./ certified in X and Y-NPL* and NIST** traceable
C./ certified in X,Y,Z- the Z measurement is traceable to NIST only.


Although the specimens can be supplied unmounted, but these pattern sits on highly stressed quartz which is easily chipped. The use of a special protective holder is recommended. The universal holder enables the standard to be used for SEM and optical applications using reflected and transmitted illumination. Alternatively it can be supplied in a precision metal slide 25mm x 43mm for optical use only. A separate version 3.0mm diameter 0.5mm thick, is available for use in transmission electron microscope using the SED and BED modes

  * NPL = National Physical Laboratories, UK
** NIST = National Institute of Standards and Technology, USA

Ordering information for MRS-3:

When ordering make reference for universal holder or
optical holder for mounted specimen.

Catalog #

Description

Qty

S1990

MRS-3 Reference standard, non certified

Each
S1991

MRS-3 Reference standard, certified X,Y NPL and NIST traceable

Each
S1992

MRS-3 Reference standard, certified X,Y NPL and NIST traceable with Z calibration NIST traceable

Each
S1993

MRS-3 Reference standard, non certified, 3mm dia.

Each
Please use the catalog number and description when ordering.

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Geller Reference Standard MRS-4


This is similar in design and construction to the MRS-3. For high magnification calibration, two additional nested squares with pitches of 1um and 0.5um extend the useful calibration range to x2000,000. Two 6mm long scales in the X and Y directions which are subdivided at 1um intervals allow calibration over a wide range of magnifications using the same scale.


Ordering information for MRS-4:

When ordering make reference for universal holder or optical holder for mounted specimen.
 

Catalog #

Description

Qty

S1810

MRS-4 Reference standard, non certified

Each
S1811

MRS-4 Reference standard, certified X,Y NPL and NIST traceable

Each
S1812

 MRS-4 Reference standard, certified X,Y NPL and NIST traceable with Z calibration NIST traceable

Each
S1813

 MRS-4 Reference standard, non certified, 3mm dia.

Each
Please use the catalog number and description when ordering.

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Online Catalogs

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For your convenience we have also provided our latest supplemental catalogs in PDF format here.

Other catalogs may be found within the Products section.